Varian VHS-6 Instruction Manual download pdf (Page 25)

Troubleshooting

4-2

Table 4-1 Troubleshooting

Fault Probable Cause Corrective Action

Poor system pressure Leaks in system, virtual or real Locate and repair.

High process gas load Measure gas load, eliminate cause.

System dirty Clean system to reduce outgassing.

Poor ultimate pressure Contaminated pump fluid Examine, clean pump,replace fluid.

Low heat input Check voltage. Check for continuity,

burned-out element, poor thermal

contact.

Inadequate cooling water flow Check water pressure. Check tubing

for obstructions and backpressure.

Excessive or too cold cooling water Check temperature. Adjust flow.

High forepressure Check for leak in foreline, poor

mechanical pump performance,

breakdown of mechanical pump fluid.

Water in quick-cool coil Check and remove water.

Low heat input Check heaters.

Low oil level Add oil.

Malfunctioning pump assembly. Check and repair or replace.

Improperly located jets. Damaged

jet system.

Inlet pressure surges Incorrect heater voltage Check and correct voltage.

Fluid outgassing Condition fluid by operating the

pump for a few hours.

Leak in system ahead of pump inlet Check and correct.

High chamber Forepressure too high Check for leak in foreline, poor

contamination mechanical pump performance,

breakdown of pump fluid, and

incorrect valve operation.

Prolonged operation at high through- Review operating procedures.

put at pressure above 10

-3

Torr (.133 Pa)

Improper system operation and Review operating procedures.

air release procedures

Pump will not start Safety circuits and/or protective Check utilities, flow switches,

devices prevent contactor from interlocks. Check thermostat

staying closed operation.

Slow pumpdown (Pro-

longed cycle after

checking gas goad

conditions)

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Varian VHS-6 Instruction Manual Page 25

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