Varian VHS-6 Instruction Manual download pdf (Page 7)

VHS-4, VHS-6 and VHS-250 Diffusion Pumps

vii

Contents

Introduction ............................................................................................................................... 1-1

Pump Specifications ........................................................................................................................... 1-1

Installation ............................................................................................................................... 1-10

Unpacking ........................................................................................................................................ 1-10

Pump Oil Installation ........................................................................................................................ 1-10

Vacuum System Connections ........................................................................................................... 1-11

Cooling Water Connections .............................................................................................................. 1-11

Electrical Connections ...................................................................................................................... 1-12

Thermal Switch ................................................................................................................................ 1-13

Startup ....................................................................................................................................... 2-1

Shutdown .................................................................................................................................. 2-2

General Maintenance ................................................................................................................ 3-1

Inspection Requirements ............................................................................................................ 3-1

Cleaning .................................................................................................................................... 3-2

VHS-4 and VHS-6 Cold Cap Removal/Installation ...................................................................... 3-3

VHS-250 Cold Cap Removal/Installation .................................................................................... 3-4

Jet Assembly Removal/Installation ..............................................................................................3-5

Heater Replacement .................................................................................................................. 3-8

Pump Fluid Charge .................................................................................................................. 3-10

Leakage ..................................................................................................................................... 4-1

Outgassing ................................................................................................................................. 4-1

Poor Pump or System Performance ............................................................................................ 4-2

1 2 3 4 5 6 7 8 9 10 11 12 ... 59 60

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Varian VHS-6 Instruction Manual Page 7

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