Varian VHS-6 Instruction Manual download pdf (Page 36)

VHS-4, VHS-6 and VHS-250 Diffusion Pumps

2-2

DRAFT 2/24/05

5. Monitor inlet and foreline pressures.

During operation of the diffusion pump:

❑ The gas load at the inlet should not exceed the maximum throughput capability of

the pump.

❑ The forepressure should not exceed the specified tolerable forepressure.

2.2 Shutdown

1. Turn off the power to the diffusion pump and continue to back the diffusion pump with

the appropriate mechanical pump.

2. Allow cooling water to flow through the diffusion pump until the pump body

temperature, located just above the boiler plate, has cooled to a temperature of

approximately 130 °F.

After isolating the backing pump, the diffusion pump can be vented to atmosphere.

If faster cooling is desired, the pump can be cooled using the Quick Cool Coil at the

bottom of the diffusion pump.

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Varian VHS-6 Instruction Manual Page 36